| 
 序號  | 
 檢測氣體類型  | 
 分子式  | 
 量程  | 
| 
 1  | 
 可燃性氣體  | 
 0-10%LEL/0-100%LEL  | |
| 
 2  | 
 氨氣  | 
 NH3  | 
 0-50/100/400/1000ppm  | 
| 
 3  | 
 砷化三氫/胂  | 
 AsH3  | 
 0-0.2ppm  | 
| 
 4  | 
 三氯化硼  | 
 BCl3  | 
 0-6ppm  | 
| 
 5  | 
 溴  | 
 BR2  | 
 0-0.4ppm  | 
| 
 6  | 
 一氧化碳  | 
 CO  | 
 0-100/200/500ppm  | 
| 
 7  | 
 氯氣  | 
 Cl2  | 
 0-2/5/15ppm  | 
| 
 8  | 
 二氧化氯  | 
 ClO2  | 
 0-0.4ppm  | 
| 
 9  | 
 硼乙烷  | 
 B2H6  | 
 0-0.4ppm  | 
| 
 10  | 
 二氯甲硅烷  | 
 SiH2Cl2  | 
 0-10ppm  | 
| 
 11  | 
 環(huán)氧乙烷  | 
 C2H4O  | 
 0-50ppm  | 
| 
 12  | 
 氟  | 
 F2  | 
 0-4ppm  | 
| 
 13  | 
 鍺烷  | 
 GeH  | 
 0-0.8ppm  | 
| 
 14  | 
 氫氣  | 
 H2  | 
 0-1000ppm  | 
| 
 15  | 
 溴化氫  | 
 HBr  | 
 0-12ppm  | 
| 
 16  | 
 氯化氫  | 
 HCl  | 
 0-20ppm  | 
| 
 17  | 
 氰化氫  | 
 HCN  | 
 0-20ppm  | 
| 
 18  | 
 氟化氫  | 
 HF  | 
 0-12ppm  | 
| 
 19  | 
 硫化氫  | 
 H2S  | 
 0-15/20/50/100ppm  | 
| 
 20  | 
 一氧化氮  | 
 NO  | 
 0-100ppm  | 
| 
 21  | 
 二氧化氮  | 
 NO2  | 
 0-12ppm  | 
| 
 22  | 
 氧氣  | 
 O2  | 
 0-21%V/V  | 
| 
 23  | 
 臭氧  | 
 O3  | 
 0-4ppm  | 
| 
 24  | 
 磷化氫  | 
 PH3  | 
 0-1.2ppm  | 
| 
 25  | 
 硅烷  | 
 SiH4  | 
 0-20ppm  | 
| 
 26  | 
 環(huán)氧丙烷  | 
 C3H6O  | 
 0-50ppm  | 
| 
 27  | 
 二氧化硫  | 
 SO2  | 
 0-8/15/50ppm  |