|
序號(hào) |
檢測(cè)氣體類型 |
分子式 |
量程 |
|
1 |
可燃性氣體 |
|
0-10%LEL/0-100%LEL |
|
2 |
氨氣 |
NH3 |
0-50/100/400/1000ppm |
|
3 |
砷化三氫/胂 |
AsH3 |
0-0.2ppm |
|
4 |
三氯化硼 |
BCl3 |
0-6ppm |
|
5 |
溴 |
BR2 |
0-0.4ppm |
|
6 |
一氧化碳 |
CO |
0-100/200/500ppm |
|
7 |
氯氣 |
Cl2 |
0-2/5/15ppm |
|
8 |
二氧化氯 |
ClO2 |
0-0.4ppm |
|
9 |
硼乙烷 |
B2H6 |
0-0.4ppm |
|
10 |
二氯甲硅烷 |
SiH2Cl2 |
0-10ppm |
|
11 |
環(huán)氧乙烷 |
C2H4O |
0-50ppm |
|
12 |
氟 |
F2 |
0-4ppm |
|
13 |
鍺烷 |
GeH |
0-0.8ppm |
|
14 |
氫氣 |
H2 |
0-1000ppm |
|
15 |
溴化氫 |
HBr |
0-12ppm |
|
16 |
氯化氫 |
HCl |
0-20ppm |
|
17 |
氰化氫 |
HCN |
0-20ppm |
|
18 |
氟化氫 |
HF |
0-12ppm |
|
19 |
硫化氫 |
H2S |
0-15/20/50/100ppm |
|
20 |
一氧化氮 |
NO |
0-100ppm |
|
21 |
二氧化氮 |
NO2 |
0-12ppm |
|
22 |
氧氣 |
O2 |
0-21%V/V |
|
23 |
臭氧 |
O3 |
0-4ppm |
|
24 |
磷化氫 |
PH3 |
0-1.2ppm |
|
25 |
硅烷 |
SiH4 |
0-20ppm |
|
26 |
環(huán)氧丙烷 |
C3H6O |
0-50ppm |
|
27 |
二氧化硫 |
SO2 |
0-8/15/50ppm |