主要特點(diǎn)及優(yōu)點(diǎn) |
Fully customizable systems that can include:
Configurations that range from bench-top to full-height racks of instrumentation
Wafer level and cassette level automation
Compatibility with popular semi- and fully-automatic wafer probers
Test setup tightly integrated with wafer setup
Interactive prober control for setup and analysis
Binning and wafer mapping
Interactive graphical results displayed at both test setup and cassette level review
Configurable, real time results plotted during automation
Report generation and summary tool
Integrated test script development tools
Extensive parametric test library for both Series 2600 and Model 4200-SCS |
ACS integrated test systems are highly configurable, instrument based systems for semiconductor characterization at the device, wafer, or cassette level; offering unique measurement capability with powerful and flexible automation oriented software. Keithleys proven instruments and measurements are the core of the system, which is controlled by the ACS (Automated Characterization Suite) software. Our ACS systems fill the gap between interactive laboratory based tools and high cost and high throughput production test tools. |
應(yīng)用 |
Advanced Reliability (WLR) Testing
Multi-Site Parallel Wafer/Die Sort
SMU-Per-Pin WLR Testing
Automated Device Characterization
Hot Carrier Injection (HCI)
Gate Oxide Integrity (TDDB, VRAMP, JRAMP
Isothermal Electromigration
Bias Temperature Instability (NBTI and PBTI) |